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Characterization 206

Physico-chemical characterization 15Spectrometric and spectroscopic analysis 26Thermal characterization 8Electrical characterization 10Electrochemical characterization 6Microscopy 23Sample preparation for electron microscopy 2Thin film thickness measurements 9Optical Characterization 1

Scale-up 25

Pilot test bench 8Backend/frontend process 3Characterization techniques - high throughput 1

Cleanroom 59

Other lithographic techniques 6Thin film and micro/nanoparticule growth 4Etcher 3Optical and ebeam lithography 7Backend/frontend process 3Thermal process 7

Materials synthesis and surface functionalization 27

Thin film and micro/nanoparticule growth 10Backend/frontend process 1Electrochemical surface structuring 1Organic material synthesis 1

Caractérisation mécanique 7Fabrication additive 9Mise en forme 20Polymères et composites 9Fabrication additive – Métal 1Usinage 4Post-traitement 3Caractérisation optique 5

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NoneAtomic force microscopy (AFM) 10Auger spectroscopy 2BET porosity measurement 1Bioreactor 8calorimeter 1Centrifugal deposits 4Charge and diameter measurement (zeta potential) 3Chemical composition 1chromatographie 1Cyclic voltametry 4Differential scanning calorimetry (DSC) 2Dip-pen nanolithography 1Ebeam deposition 1Ebeam lithography 2Ellipsometry 5Focused ion beam (FIB) 1Fourier transform infrared spectroscopy (FT-IR) 6Furnace annealling 3Glove box 1I/V, C/V and four point probe 3Impedance measurement 1Inductively coupled plasma reactive ion etching (ICP-RIE) 3Ion implant 2Joule effect evaporator 2Laser ablation deposition 2Liquid phase chromatography 2Low–pressure chemical vapor deposition - LPCVD 1Mask aligner 5Microfabrication 4Nuclear magnetic resonance (NMR) 2Plasma enhanced chemical vapor deposition - PECVD 1Polishing 2Porosimeter 1Porosimètre 1Potentiostat 1préparation échantillons 2Preparation of thin slices of samples 1Printers - printable electronic 2Profilometry 4Quartz cristal microbalance 1Raman spectroscopy 3Rapid thermal anneal (RTA) 3RBS spectroscopy 1Scanning electron microscopy (SEM) 5Scanning tunneling microscope / atomic force microscopy (STM/AFM) 4spectrométrie de masse 1Spectroscopie Émission Atomique 1Sputtering deposition 1Surface analysis (TOF-SIMS) 1Thermogravimetry (TGA) 2Thermomechanical analysis (TMA) 1Transmission electron microscopy (TEM) 1Wafer saw 1Wire bonding 1X-Ray photoelectron spectroscopy (XPS) 4Xray diffraction (XRD) 3

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Characterization 206

Physico-chemical characterization 15Spectrometric and spectroscopic analysis 26Thermal characterization 8Electrical characterization 10Electrochemical characterization 6Microscopy 23Sample preparation for electron microscopy 2Thin film thickness measurements 9Optical Characterization 1

Scale-up 25

Pilot test bench 8Backend/frontend process 3Characterization techniques - high throughput 1

Cleanroom 59

Other lithographic techniques 6Thin film and micro/nanoparticule growth 4Etcher 3Optical and ebeam lithography 7Backend/frontend process 3Thermal process 7

Materials synthesis and surface functionalization 27

Thin film and micro/nanoparticule growth 10Backend/frontend process 1Electrochemical surface structuring 1Organic material synthesis 1

Caractérisation mécanique 7Fabrication additive 9Mise en forme 20Polymères et composites 9Fabrication additive – Métal 1Usinage 4Post-traitement 3Caractérisation optique 5

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Tag

NoneAtomic force microscopy (AFM)Auger spectroscopyBET porosity measurementBioreactorcalorimeterCentrifugal depositsCharge and diameter measurement (zeta potential)Chemical compositionchromatographieCyclic voltametryDifferential scanning calorimetry (DSC)Dip-pen nanolithographyEbeam depositionEbeam lithographyEllipsometryFocused ion beam (FIB)Fourier transform infrared spectroscopy (FT-IR)Furnace anneallingGlove boxI/V, C/V and four point probeImpedance measurementInductively coupled plasma reactive ion etching (ICP-RIE)Ion implantJoule effect evaporatorLaser ablation depositionLiquid phase chromatographyLow–pressure chemical vapor deposition - LPCVDMask alignerMicrofabricationNuclear magnetic resonance (NMR)Plasma enhanced chemical vapor deposition - PECVDPolishingPorosimeterPorosimètrePotentiostatpréparation échantillonsPreparation of thin slices of samplesPrinters - printable electronicProfilometryQuartz cristal microbalanceRaman spectroscopyRapid thermal anneal (RTA)RBS spectroscopyScanning electron microscopy (SEM)Scanning tunneling microscope / atomic force microscopy (STM/AFM)spectrométrie de masseSpectroscopie Émission AtomiqueSputtering depositionSurface analysis (TOF-SIMS)Thermogravimetry (TGA)Thermomechanical analysis (TMA)Transmission electron microscopy (TEM)Wafer sawWire bondingX-Ray photoelectron spectroscopy (XPS)Xray diffraction (XRD)

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