Zeiss GeminiSEM 560 scanning electron microscope (SEM)
Zeiss GeminiSEM 560 scanning electron microscope (SEM)
| MANUFACTURER | Zeiss |
|---|---|
| MODEL | GeminiSEM 560 |
General description:
Surface characterization and elemental chemical analysis
Characteristics :
- Resolution:
- 0.5 nm @ 15 kV
- 0.8 nm @ 1 kV
- 1.0 nm @ 500 V
- Magnification: 1X to 2000000X
- Electron gun: Schottky thermal field emission
- Probe current: 3 pA to 20 nA
- Acceleration voltage: 0,02 to 30 kV
- Variable pressure mode (10 to 60 Pa)
- Secondary electron Everhart-Thornley detector
- In Lens secondary electron detector
- BxE Backscattered electron detector
- aBSD4 Backscattered electron detector)
- VPSE detector (variable pressure mode)
- Specimen stage
- X: 153 mm
- Y: 153 mm
- Z: 50 mm
- Z’: 13 mm
- Tilt: -15 to 70 degrees
- Rotation: 360 degrees continuous
- X-Rays Energy dispersive spectrometer (EDS): Oxford Ultim Max allowing elemental chemical analysis.
To use this equipment
The equipment available is accessible to the academic and industrial research community.
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