Spin Coater (CEE100)
Spin Coater (CEE100)
Additional information
| MANUFACTURER | Brewer |
|---|---|
| MODEL | CEE100 |
Samples
- Sample size : 150 mm maximum
- Dispensing: manual and automatic
Characteristics
- Completely automated operation via saved recipes
- Automated wafer back-side cleaning and edge bead removal
- Rotation speed: 0 to 6000 rpm ± 1 rpm
- Acceleration: up to 50 krpm/s
- Integrated heating plate: up to 250 °C ± 0.1 °C
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.