Description
Additional information
| MANUFACTURER | Conception HiVac System |
|---|---|
| MODEL | Home made |
Unique in Quebec :
- Offering the ability to perform evaporations on rotating samples
- Sample sizes : 10 mm to 100 mm
Characteristics
- Pressure : 0.001 mTorr to 0.0035 mTorr
- Source Telemark, Model 211
- Mini DC motor for samples rotation
- Possibility to perform a joule effect evaporation before or after an e-beam evaporation
ROUTINE PROCESS
Evaporation
Metal deposition
- Al and Pt
- Thickness : 15 nm to 500 nm
