Ellipsometer (M-2000)

$0.00

Description

Additional information

MANUFACTURER J.A. Woollam
MODEL M-2000

Samples

  • Sample sizes: maximum 150 mm x 150 mm (6ˮ x 6ˮ)
  • Thickness : maximum 1 cm

Analysis

  • Quantitative measurement of the optical constants and thicknesses of thin films
  • 3D mapping possible
  • Spectral resolution: 0.05 nm
  • Measurement in reflexion mode

Applications

  • Quick photoresist thickness measurement

Characteristics

  • Wavelengths: 370 to 1000 nm
  • Sample holder: small die up to 150 mm wafers
  • Accessories improving resolution up to 150 µm

 

Additional information

MANUFACTURER

J.A. Woollam

MODEL

M-2000