Flatness-surface shape measurement
Flatness-surface shape measurement
| MANUFACTURER | Altimet |
|---|---|
| MODEL | Altisurf 530 |
General description:
Metrology of surfaces for microtechnics. Typical application flatness/surface shape mesure (z measurement)
Characteristics :
- Modular metrology platform: 300X300X200mm
- Accuracy: 3 µm (z axis)
- Tech. specs: mfd 2nm/mm, sigma/step inf. 3nm
- 2 on-board indexed probes
- 2 Chromatic confocal probes
- Video cameras with stationary zoom for the programmation of the measurement areas
- 3 DC motorized axis: XYZ
- Encoders resolution: 0,1 µm
- Non-linear axis correction
- Hysteresis calibration
- Software compatible with Windows XP
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.