March CS-1701 (RIE)
March CS-1701 (RIE)
| MANUFACTURER | March |
|---|---|
| MODEL | RIE CS-1701 |
General description:
Surface etch with plasma
Characteristics :
- Surface etch or conditioning with the use of a plasma
- Power: up to 600W
- Available gas: N2, Ar, O2, CF4
- Maximum sample diameter: 15 cm
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.