Description
Additional information
| MANUFACTURER | Brewer |
|---|---|
| MODEL | CEE100 |
Samples
- Sample size : 150 mm maximum
- Dispensing: manual and automatic
Characteristics
- Completely automated operation via saved recipes
- Automated wafer back-side cleaning and edge bead removal
- Rotation speed: 0 to 6000 rpm ± 1 rpm
- Acceleration: up to 50 krpm/s
- Integrated heating plate: up to 250 °C ± 0.1 °C
