Description
Additional information
MANUFACTURER | JEOL |
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MODEL | JAMP-30 Auger Microprobe |
Equipment unique in Quebec, allowing:
- The in-situ breaking of liquid nitrogen cooled samples for the contamination-free analysis of the broken surface
- Semi-quantitative surface and depth profile analysis of the chemical composition
- Depth profiling up to 1 µm
- Depth and surface mapping available
- Lateral resolution: ~ 1 µm
- Equipped with an Argon ion beam for sputtering (depth profiling)
Applications
- Composition profiling of thin films
- Study of surface contamination