Dielectric etch
Dielectric etch
| MANUFACTURER | SPTS |
|---|---|
| MODEL | Versalis FxP APS module |
General description:
Dry etch cluster tool
Characteristics :
- Dielectric etch module
- Tailored chamber design to increase the process stability
- Plasma density necessary for the successful etching of strongly bonded materials
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.