02 plasma polymers strip
02 plasma polymers strip
| MANUFACTURER | ULVAC |
|---|---|
| MODEL | Enviro-1Xa 200 mm |
General description:
Single wafer advanced polymer asher
Characteristics :
- Choice of plasma sources
- Forming gas 3.5% provides the advantage of catalysis for generation of atomic oxygen in plasma
- Possibility of additional gas for removal of Bosch process polymers
- Excellent uniformity and repeatability
- High throughput
- End-point detection
- Very fast ashing of a variety of polymers:
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.