Metal Engraving
Metal Engraving
| MANUFACTURER | SPTS |
|---|---|
| MODEL | Versalis FxP ICP module |
General description:
Dry etch cluster tool
Characteristics :
- Metal etch module
- Patented high density plasma source incorporating a radial coil design
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.