Scanning Electron Microscope (sem) (JSM 7600 TFE)

Description

Additional information

Samples

• Equipped with a Field Effect Gun (FEG) for the observation of non-conducting samples

Analysis

• High resolution surface imaging
• Lateral resolution : 1.4 nm at 1 kV and 1.0 nm at 15 kV

Characteristics

• Instrument unique  in Canada allowing the analysis of non-conducting samples at high resolution

Variants

Detection of back-scatted electrons for phase analysis

• Lateral resolution : 3 nm at 1 kV
• Sample holder for non-conducting samples

Energy Dispersive Spectrometry (EDS) for chemical composition determination

• Semi-quantitative and quantitative (with standards)
• Mapping possible
• Lateral resolution : of the order of one micrometer (depending on the material and the accelerating voltage)
• Applications : Elemental mapping, quantification of the chemical composition of a given phase
• Detection limit: about 0.1% atomic

Wavelength Dispersive Spectrometry (WDS) for chemical composition determination

• Semi-quantitative and quantitative (with standards)
• Mapping possible
• Lateral resolution : of the order of one micrometer (depending on the material and the accelerating voltage)
• Applications : Elemental mapping, quantification of the chemical composition of a given phase
• Detection limit: about 0.1% atomic