Silicon etch
Silicon etch
| MANUFACTURER | Akrion |
|---|---|
| MODEL | GAMA wet processor C |
General description:
Provide wet-chemical wafer cleaning, surface preparation, and etch
Characteristics :
- Dry-in/dry-out automated SMIF pod input/output operation;
- Mini-environment within wet bench secures class 1 clean room performance on the wafer surface;
- Real time particle monitoring in chemical tanks;
- Multiple lot/recipe processing (up to 4 recipes on single bench at the same time);
- High throughput and low cost per wafer;
- Real time chemical analysis and concentration adjustments:
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.