Description
Additional information
| MANUFACTURER | Veeco |
|---|---|
| MODEL | NanoMan VS |
Samples
- Samples size : 150 mm maximum
Analysis
- Modes: contact, non-contact, lateral force, phase image, magnetic force, electronic force, surface potential and torsion resonance
- Scanning range: 90 µm (X-Y), 9 µm (Z)
- Number of measurement points per image: 5120 x 5120
- Resolution : 16 bits
- Motorized stage: operating range 120 x 100 mm
Applications
- Analysis of small surface phases
- Nanometric scale validation of photoresist final surfaces
- Surface analysis of hard materials
Characteristics
- Unidirectional resolution: 2 µm
- Scanning speed and range adjustable
- Thickness: 12 mm maximum
- Z noise: less than 0.1 nm RMS
- Limitations: some semi-crystalline materials may be analyzed
- Incompatibility: all soft materials
