Description
Additional information
MANUFACTURER | Veeco |
---|---|
MODEL | Dektak D150 |
Samples
- Sample sizes : 150 mm diameter
- Thickness: 90 mm
Analysis
- Vertical resolution: 0.1 nm
- Vertical repeatability: more than 0.6 nm
- Scan length: 55 mm
- Programmable stage : operating range 150 mm x 150 mm, repeatability 1 µm
- Vertical movement range: 1 mm