Plasma etch
Plasma etch
| MANUFACTURER | Nordson March |
|---|---|
| MODEL | AP1000 |
General description:
Plasma cleaning
Characteristics :
- Stainless steel vacuum chamber 18 W x24 H x 18 D inches
- One electrode technology shelf-sets with 14 positions
- Electrodes are aluminum using ceramics insulators
- 13.56 MHz RF generator has automatic impedance matching
- Power shelf working dimensions 13.74 W x 16.73 D inches
- Ground shelf working dimensions 15.1 W x 16.73 D inches
- Automatic RF tuning network, use a L-C tuning network
- Gas control with 4 mass flow controllers
- Oxygen, argon and nitrogen gas currently available
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.