Description
Additional information
| MANUFACTURER | FEI Company |
|---|---|
| MODEL | Quanta 3D FEG |
Samples
- Equipped with a Field Effect Gun (FEG) allowing the observation of non-conducting samples
- Equipped with a Ga+ion gun: 2 to 30 kV, 1 pA to 65 nA with a resolution of 7 nm
Analysis
- Electron gun: 200 V to 30 kV, 200 nA maximum
- Resolution : 1,2 nm
Variants
- Energy Dispersive Spectrometer (EDS) for X-ray elemental analysis
Applications
- Nanometric-scale sample observation (SEM)
- X-ray elemental analysis (EDS)
- Nanometric-scale etch (FIB)
- Cross-section analysis of multilayer films (FIB-SEM)
