Scanning Electron Microscope (sem) (Quanta 3D FEG)

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Description

Additional information

MANUFACTURER FEI Company
MODEL Quanta 3D FEG

Samples

  • Equipped with a Field Effect Gun (FEG) allowing the observation of non-conducting samples
  • Equipped with a Ga+ion gun: 2 to 30 kV, 1 pA to 65 nA with a resolution of 7 nm

Analysis

  • Electron gun: 200 V to 30 kV, 200 nA maximum
  • Resolution : 1,2 nm

Variants

  • Energy Dispersive Spectrometer (EDS) for X-ray elemental analysis                                                                                                       

Applications

  • Nanometric-scale sample observation (SEM)
  • X-ray elemental analysis (EDS)
  • Nanometric-scale etch (FIB)
  • Cross-section analysis of multilayer films (FIB-SEM)

Additional information

MANUFACTURER

FEI Company

MODEL

Quanta 3D FEG