Scanning Electron Microscope (sem) (JSM 6300F)

Description

Additional information

Samples

• Samples size: 100 mm (4 in.) maximum

Analysis

• High resolution surface imaging
• Lateral resolution  : ~ 3 nm

Variants

• Detection of back-scattered electrons for phase analysis
• Detection and quantification of the elements via Energy Dispersive Spectrometry (EDS) for the determination of the chemical composition

Characteristics

• Probe current : 10^-12 A to 10^-10 A
• Working Distance (WD): 3 mm to 53 mm
• Magnification : 10X (WD = 39 mm) to 500,000X

ELECTRON GUN

• Field effect (cold cathode)
• Accelerating voltage: 0.5 to 30 kV
• Tip made from Tungsten <310>

Detectors

• Scintillator for secondary electrons
• Si PN junction  for back-scattered electrons
• X-ray detector for EDS analysis (all elements starting from Carbon)