Scanning Electron Microscopy with field emission
Scanning Electron Microscopy with field emission
| Manufacturer | Zeiss |
|---|---|
| MODEL | GEminiSEM 560 |
Description:
Surface characterization and elemental chemical analysis
Characteristics:
- Resolution: 0,5 nm @ 15 kV / 0,8 nm @ 1 kV / 1,0 nm @ 500 V
- Magnification: 1X to 2000000X
- Electron gun: Schottky thermal field emission
- Probe current: 3 pA to 20 nA
- Acceleration Voltage: 0,02 to 30 kV
- Variable pressure mode (10 to 60 Pa)
- Secondary electron Everhart-Thornley detector
- In Lens secondary electron detector
- BxE Backscattered electron detector
- aBSD4 Backscattered electron detector)
- VPSE detector (variable pressure mode)
- Specimen stage X: 153 mm / Y: 153 mm / Z: 50 mm / Z’: 13 mm / Tilt: -15 to 70 degrees / Rotation: 360 degrees continuous
- X-Rays Energy dispersive spectrometer (EDS): Oxford Ultim Max allowing elemental chemical analysis.
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To use this equipment
The equipment available is accessible to the academic and industrial research community.
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