Description
Additional information
MANUFACTURER | VG Scientific |
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MODEL | Escalab MkII |
Analysis
- Multisegment apparatus equipped with an ultra-high vacuum system
- Surface analysis coupling 4 characterization techniques: X-ray Photoelectron Spectroscopy (XPS); Secondary Ion Mass Spectrometry (SIMS), Ion Scattering Spectroscopy (ISS); Auger Scanning Microscopy (ASM)
Characteristics
- Double Source Mg-Al; large radius hemispherical analyzer; Monochannel detection
- Resolution is 0.88 eV on Silver
- Integrated high temperature and high pressure reactor
MODES
SIMS
- Manufacturer : SIMSLAB
- Model : MM12-12S
- Large quadrupole based scanning SIMS-Ar and SIMS-Ga
- Mass resolution : 1 amu (over a range of 1 amu to 800 amu)
- Spatial resolution : 100 µm (Ar+) and 1 µm (Ga+
ISS
- Model : VG ISS
- Resolution : 1% with He 1000 eV (Au)
ASM
- Model : MicroLab500
- Canon LEG 500 of 30 keV
- Spatial resolution : 1 µm