Atomic Force Microscopy (afm) (XE-150)

Description

Additional information

Samples

• Samples sizes: Samples size: 150 mm (6 in) maximum
• Thickness: 25 mm (1 kg) maximum

Analysis

• Types : contact mode and non-contact mode
• Mainly used for non-destructive metrology on samples (etch and lithography) and characterization of thin films micro-roughness

Characteristics

• Lateral resolution: 1.5 nm (closed-loop), 0.01 nm (open-loop)
• Mapping available
• XY scanning with closed-loop feedback control
• XY scan dimensions: 100 x 100 µm² – Vertical scan: 12 µm
• Z scan noise level: 0.05 nm (maximum)
• Motorized stage with maximum displacement of 225 × 150 mm (resolution: 0.5 µm)
• Programmable multiple points data acquisition
• CCD high resolution camera (Mpx) – maximum field of view 1680 x 1260 µm
• Anti-vibration table and acoustic chamber
• Very sharp tips for the metrology of high aspect ratio nanostructures