Ellipsometer (M-2000)
Ellipsometer (M-2000)
Additional information
| MANUFACTURER | J.A. Woollam |
|---|---|
| MODEL | M-2000 |
Samples
- Sample sizes: maximum 150 mm x 150 mm (6ˮ x 6ˮ)
- Thickness : maximum 1 cm
Analysis
- Quantitative measurement of the optical constants and thicknesses of thin films
- 3D mapping possible
- Spectral resolution: 0.05 nm
- Measurement in reflexion mode
Applications
- Quick photoresist thickness measurement
Characteristics
- Wavelengths: 370 to 1000 nm
- Sample holder: small die up to 150 mm wafers
- Accessories improving resolution up to 150 µm
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To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.