Description
Additional information
MANUFACTURER | J.A. Woollam |
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MODEL | RC2 |
Analyses
- Quantitative analysis of polarized light in reflection mode
- Lateral resolution: 200 µm
- Mapping available: yes
- Sampled depth: 0.1 to 1000 nm
Applications
- Measurements of film thickness, refractive index, absorption coefficient, interfaces, doping, anisotropy, surface roughness, uniformity and porosity
Characteristics
- Highly specialized equipment with a double compensator yielding a high accuracy. Possibility of measuring samples both anisotropic and depolarizing
- Wavelengths: from 290 nm to 1690 nm
- Variable angle and double compensator ellipsometer
- Available modules: micro-spot objective, electrochemical cell, environmentally controlled heating/cooling chamber