Auger Spectroscopy (NanoSAM)
Auger Spectroscopy (NanoSAM)
Additional information
| MANUFACTURER | Omicron Nanotechnology |
|---|---|
| MODEL | NanoSAM |
Equipment unique in the world equipped with an EBSD detector in UHV
- Semi-quantitative elemental and (in some cases) chemical analysis
- Sampled depth : 5 to 10 nm maximum
- Mapping available
- Depth profiling possible
Applications
- Surface analysis of metals and semi-conductors
- Analysis of insulating material possible but more problematic
Characteristics
- Equipped with an EBSD (back-scattered diffraction) detector in UHV
- Lateral resolution: 10 nm
- Detected elements: Lithium to Uranium
- Sensitivity: 0.1 at% to 1 at%
- Depth resolution: 2 nm to 20 nm
- Equipped with a preparation chamber, imaging during heating, sputtering by ion beam
Related products
To use this equipment
The equipment available is accessible to the academic and industrial research community.
To learn about usage conditions and availability, please fill out the form below. After reviewing your request, we will contact you shortly to offer you the best available solution.