Auger Spectroscopy (NanoSAM)

$0.00

Description

Additional information

MANUFACTURER Omicron Nanotechnology
MODEL NanoSAM

Equipment unique in the world equipped with an EBSD detector in UHV

  • Semi-quantitative elemental and (in some cases) chemical analysis
  • Sampled depth : 5 to 10 nm maximum
  • Mapping available
  • Depth profiling possible

Applications

  • Surface analysis of metals and semi-conductors
  • Analysis of insulating material possible but more problematic

Characteristics

  • Equipped with an EBSD (back-scattered diffraction) detector in UHV
  • Lateral resolution: 10 nm
  • Detected elements: Lithium to Uranium
  • Sensitivity: 0.1 at% to 1 at%
  • Depth resolution: 2 nm to 20 nm
  • Equipped with a preparation chamber, imaging during heating, sputtering by ion beam

Additional information

MANUFACTURER

Omicron Nanotechnology

MODEL

NanoSAM