Description
Additional information
| MANUFACTURER | Omicron Nanotechnology |
|---|---|
| MODEL | NanoSAM |
Equipment unique in the world equipped with an EBSD detector in UHV
- Semi-quantitative elemental and (in some cases) chemical analysis
- Sampled depth : 5 to 10 nm maximum
- Mapping available
- Depth profiling possible
Applications
- Surface analysis of metals and semi-conductors
- Analysis of insulating material possible but more problematic
Characteristics
- Equipped with an EBSD (back-scattered diffraction) detector in UHV
- Lateral resolution: 10 nm
- Detected elements: Lithium to Uranium
- Sensitivity: 0.1 at% to 1 at%
- Depth resolution: 2 nm to 20 nm
- Equipped with a preparation chamber, imaging during heating, sputtering by ion beam
