X-ray Photoelectron Spectroscopy (xps) (Escalab MkII)

X-ray Photoelectron Spectroscopy (xps) (Escalab MkII)

Additional information

MANUFACTURER VG Scientific
MODEL Escalab MkII

Analysis

  • Multisegment apparatus equipped with an ultra-high vacuum system
  • Surface analysis coupling 4 characterization techniques: X-ray Photoelectron Spectroscopy (XPS); Secondary Ion Mass Spectrometry (SIMS), Ion Scattering Spectroscopy (ISS); Auger Scanning Microscopy (ASM)

Characteristics

  • Double Source Mg-Al; large radius hemispherical analyzer; Monochannel detection
  • Resolution is 0.88 eV on Silver
  • Integrated high temperature and high pressure reactor

 

MODES

SIMS

  • Manufacturer : SIMSLAB
  • Model : MM12-12S
  • Large quadrupole based scanning SIMS-Ar and SIMS-Ga
  • Mass resolution : 1 amu (over a range of 1 amu to 800 amu)
  • Spatial resolution  : 100 µm (Ar+) and 1 µm (Ga+

ISS

  • Model : VG ISS
  • Resolution : 1% with He 1000 eV (Au)

ASM

  • Model : MicroLab500
  • Canon LEG 500 of 30 keV
  • Spatial resolution : 1 µm
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